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SS-20E6 Series GEKO High-Purity Semiconductor Gas Valves and Fittings are engineered for semiconductor manufacturing processes that demand ultra-clean performance and precise flow control. Constructed from corrosion-resistant materials such as stainless steel and fluoropolymer.
GEKO valves deliver outstanding reliability, leak-free sealing, and superior compatibility with specialty gases. Ideal for wafer fabrication, etching, CVD, and other critical cleanroom applications.
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High purity gas fittings
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Size Range NPS 1/8" - 1" |
Body Materials 316 Stainless Steel, 316L Stainless Steel, 316L VAR, 316L VIM/VAR, Alloy |
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Temperature Range -99°F to 1000°F (-73°C to 538°C) |
Stem Materials 316 Stainless Steel, 316L Stainless Steel, 316L VAR, 316L VIM/VAR, Alloy |
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Maximum Allowable Operating Pressure 6000 psi WOG (414 bar) |
Seat Materials PTFE , PEEK or Metal Seat |
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Shutoff Rating Bubble-tight, Zero Leakage (API 598 Test) |
Disc Materials 316 / 316L Stainless Steel, Alloy C |
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Body Style One-piece, Two-piece or Three-piece configurations |
Design Standard ASME B16.34, EN12516, GB/T 12237 |
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End Connections NPT Female/Male, Socket Weld, Butt Weld, Flanged (ANSI B16.5) |
Testing Standard 100% Factory Pressure & Leak Test, API 598 |
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Ports 2-way straight, 3-way T/L type, Angle flow |
Connect Platform ISO5211 mounting pad for actuators |
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Face To Face ASME B16.10, EN 588-1 F4/F5, DIN 3202 F4/F5, JIS B2002
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Applications Low and high pressure instrumentation, process control, gas and liquid lines |
Semiconductors Gas Valves and Fittings
Semiconductor Gas Valves and Fittings
Product sizes from 1/8" to 1", with working pressures from vacuum to 6000 psi
and temperature range from -99°F to 1000°F.
Optional materials include 316 Stainless Steel, 316L Stainless Steel, 316L VAR,
316L VIM/VAR, and Alloy.
Unique Design of GEKO Semiconductor Gas Valves and Fittings
GEKO instrument valves have multiple configurations to choose from,
suitable for low and high pressure environments, and can achieve precise
flow control in analytical, instrumentation, and scientific applications.
In applications that require precise flow levels, they can be finely adjusted
with flow coefficients ranging from 0.004 to 0.16. There are various handle
options available for measuring valves, which can achieve repeatable flow
regulation, enhanced flow setting control, or use a screwdriver for flow setting
adjustment in low-pressure applications.
GEKO instrument valves are applied in multiple industries
Petrochemical and natural gas industries
Water and wastewater treatment
Ship and Ocean Engineering
Environmental Protection and Industrial Water Treatment
SS-20E10 Series GEKO Compression Fitting Needle Valve for Instrumentation have multiple configurations to choose from, allowing users to find options that meet their performance requirements and system design. From basic low-pressure instrument applications to corrosive high-temperature and high-pressure applications, these needle valves can achieve reliable operation.
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SS-20E6 Series GEKO High-Purity Semiconductor Gas Valves and Fittings are engineered for semiconductor manufacturing processes that demand ultra-clean performance and precise flow control. Constructed from corrosion-resistant materials such as stainless steel and fluoropolymer. GEKO valves deliver outstanding reliability, leak-free sealing, and superior compatibility with specialty gases. Ideal for wafer fabrication, etching, CVD, and other critical cleanroom applications.
Read More
GEKO One-Piece Instrumentation Ball Valves （20G/21G/22G/23G/24/25 Series）are precision-engineered for reliable flow control in critical instrumentation systems. Designed for on-off, switching, and crossover flow paths, these valves provide leak-tight performance and long service life under demanding conditions.
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Email : info@geko-union.com
Email : info@geko-valves.de
Email : tw@geko-union.com
Email : nl@geko-union.com
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